TY - GEN
T1 - Transfer properties of moth-eye structure film by RTR UV-NIL
AU - Uchida, T.
AU - Moro, M.
AU - Hiwasa, S.
AU - Taniguchi, J.
N1 - Publisher Copyright:
© 2015 The Japan Institute of Electronics Packaging.
PY - 2015/5/20
Y1 - 2015/5/20
N2 - Anti-reflection (AR) film is very useful for prevention of light reflection on FPDs and solar-cell panel. In particular, AR structure (moth-eye structure) film has high performance on prevention from light reflection. Our previous study reported that anti-reflection structure was fabricated by oxygen ion beam irradiation to glassy carbon (GC) [1]. In this study, we focused on the transfer properties of AR structure film by roll to roll UV nano-imprint lithography (RTR UV-NIL) with replica mold [2]. To obtain the two types of replica molds, two types of photo-curable resin (PARQIT OEX-028-X433-3, Autex Co., Ltd and PAK-01-CL; Toyo Gosei Co. Ltd., Tokyo) were used. These replica molds were fabricated from the GC master mold which was irradiated by oxygen ion beam. We examined the feed speed dependence on RTR UV-NIL using two types replica molds. In addition, we examined the durability of replica mold at the optimum feed speed for transferred AR structure film. As a result, we were able to produce high-performance AR film at a feed speed of 6.0 m/min and we also confirmed no change of transferred film up to 200 imprint times.
AB - Anti-reflection (AR) film is very useful for prevention of light reflection on FPDs and solar-cell panel. In particular, AR structure (moth-eye structure) film has high performance on prevention from light reflection. Our previous study reported that anti-reflection structure was fabricated by oxygen ion beam irradiation to glassy carbon (GC) [1]. In this study, we focused on the transfer properties of AR structure film by roll to roll UV nano-imprint lithography (RTR UV-NIL) with replica mold [2]. To obtain the two types of replica molds, two types of photo-curable resin (PARQIT OEX-028-X433-3, Autex Co., Ltd and PAK-01-CL; Toyo Gosei Co. Ltd., Tokyo) were used. These replica molds were fabricated from the GC master mold which was irradiated by oxygen ion beam. We examined the feed speed dependence on RTR UV-NIL using two types replica molds. In addition, we examined the durability of replica mold at the optimum feed speed for transferred AR structure film. As a result, we were able to produce high-performance AR film at a feed speed of 6.0 m/min and we also confirmed no change of transferred film up to 200 imprint times.
KW - Anti-reflection film
KW - RTR UV-NIL
KW - moth-eye
UR - http://www.scopus.com/inward/record.url?scp=84936119692&partnerID=8YFLogxK
U2 - 10.1109/ICEP-IAAC.2015.7111049
DO - 10.1109/ICEP-IAAC.2015.7111049
M3 - Conference contribution
AN - SCOPUS:84936119692
T3 - ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference
SP - 422
EP - 427
BT - ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference, ICEP-IAAC 2015
Y2 - 14 April 2015 through 17 April 2015
ER -