TY - GEN
T1 - Three dimensional nano imprint lithography using photo-curable resin
AU - Taniguchi, Jun
AU - Unno, Noriyuki
AU - Kamiya, Yasuhiro
AU - Sakai, Nobuji
AU - Ohsaki, Takeshi
PY - 2009/11/25
Y1 - 2009/11/25
N2 - Three dimensional (3D) Nanoimprint Lithography (NIL) was carried out using photo-curable resin. NIL process was as follows: first, a fabricated NIL mold was coated with an anti-sticking layer. Then, a ultraviolet (UV) photo-curable resin was dispensed onto cleaned glass slides or polyethylene terephthalate (PET) films. Next, the mold was pressed against the resin on the substrate. The photo-curable resin was then exposed of UV light. The mold was then retracted, leaving behind a replica of its pattern. Using 3D mold with markedly uneven, evaluation of photo-curable resin was possible and it was found that weaker intermolecular force monomers improved transfer and release properties.
AB - Three dimensional (3D) Nanoimprint Lithography (NIL) was carried out using photo-curable resin. NIL process was as follows: first, a fabricated NIL mold was coated with an anti-sticking layer. Then, a ultraviolet (UV) photo-curable resin was dispensed onto cleaned glass slides or polyethylene terephthalate (PET) films. Next, the mold was pressed against the resin on the substrate. The photo-curable resin was then exposed of UV light. The mold was then retracted, leaving behind a replica of its pattern. Using 3D mold with markedly uneven, evaluation of photo-curable resin was possible and it was found that weaker intermolecular force monomers improved transfer and release properties.
KW - Electron beam lithography
KW - Glassy carbon
KW - Nanoimprint lithography
KW - Photo-curable resin
KW - Three dimensional mold
UR - http://www.scopus.com/inward/record.url?scp=70449781488&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:70449781488
SN - 9781615673278
T3 - Annual Technical Conference - ANTEC, Conference Proceedings
SP - 3044
EP - 3048
BT - 67th Annual Technical Conference of the Society of Plastics Engineers 2009, ANTEC 2009
T2 - 67th Annual Technical Conference of the Society of Plastics Engineers 2009, ANTEC 2009
Y2 - 22 June 2009 through 24 June 2009
ER -