The depth control of circular grooves fabricated by rotational electron beam machining

Takao Okabe, Kai Ojima, Yuta Shinonaga, Noriyuki Unno, Masaaki Miyatake, Jun Taniguchi, Shigeka Yoshimoto, Shinya Sasaki

研究成果: Paper査読

抄録

The holographic medium that has three-dimensional patterns is studied as a next generation optical disk media. The next generation optical disk recording devices are required to be able to machine the depth controlled pattern. However, to the best of our knowledge, there has been no previous report of making depth controlled pattern that supposed a holographic medium by using vacuum compatible fluid lubricated rotational EB machining. In this paper, we have tried to make depth controlled pattern experimentally by using hydrodynamic spindle for EB machining devices. The proposed system could machine nano scale concentric circular grooves with changing the depth of grooves without changing the width of grooves. The system might be able to apply to the next generation EB recorder such as holographic master disk recorder which can control only the depth of circular patterns in a state that the width of the patterns is kept constant.

本文言語English
出版ステータスPublished - 18 10 2015
イベント8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan
継続期間: 18 10 201522 10 2015

Conference

Conference8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
CountryJapan
CityKyoto
Period18/10/1522/10/15

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