Structural characterization of epitaxial ScAlN films grown on GaN by low-temperature sputtering

Keyphrases

• Epitaxial 100%
• Structural Characterization 100%
• Low Temperature Sputtering 100%
• Aluminum Scandium Nitride (AlScN) 100%
• ScAlN Film 100%
• Lattice Constant 50%
• Ferroelectric Properties 25%
• Physical Properties 25%
• Electronic Devices 25%
• C-axis 25%
• Piezoelectric Properties 25%
• Device Application 25%
• High-resolution X-ray Diffraction (HRXRD) 25%
• Machine Learning Models 25%
• Constant Strain 25%
• Reciprocal Space Mapping 25%
• Machine Learning Analysis 25%
• Valuable Insight 25%
• Mapping Learning 25%
• Coherent Growth 25%
• Structural Attributes 25%
• Film Strain 25%

Material Science

• Film 100%
• Lattice Constant 66%
• Ferroelectricity 33%
• Piezoelectric Property 33%
• Physical Property 33%
• High Resolution X-Ray Diffraction 33%

Chemical Engineering

• Film 100%
• Learning System 66%