@inproceedings{c1677e6b0a234536a37e760c77a48554,
title = "Miniaturization of Swelling Structures Fabricated on 6H-SiC Surface by Ion-beam Irradiation",
abstract = "In a series of previous experiments, a swelling structure, which was fabricated by ion-beam induced expansion effect, was observed on crystal materials and the height changes depending on irradiation condition. In case of SiC crystal, which is one of hopeful ultra-hard materials, the expansion rate is relatively large 10-20%. This result indicates the possibility of the expansion effect as a fabrication process for three-dimensional structures on SiC surface. In the present research, fabrication of swelling structure on 6H-SiC substrate, whose lateral size is in micro-meter scale, has been tried by irradiating Ar beams through a stencil mask.",
keywords = "Ar-beam, SiC, fabrication, micro, swelling structure",
author = "S. Momota and K. Honda and J. Taniguchi",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 22nd International Conference on Ion Implantation Technology, IIT 2018 ; Conference date: 16-09-2018 Through 21-09-2018",
year = "2018",
month = sep,
doi = "10.1109/IIT.2018.8807953",
language = "English",
series = "Proceedings of the International Conference on Ion Implantation Technology",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "94--96",
editor = "Heiner Ryssel and Volker Haublein",
booktitle = "2018 22nd International Conference on Ion Implantation Technology, IIT 2018 - Proceedings",
}