Micropatterning of ferroelectric Bi₄Ti₃O₁₂ using electron-beam-induced reaction of metal octylate films

Keyphrases

• Acetone 16%
• Bi4Ti3O12 100%
• Bismuth 16%
• Calcination 16%
• Electron Beam 100%
• Electron Beam Irradiation 33%
• Exposure Characteristics 16%
• Film Development 16%
• G-value 16%
• Heat Treatment 16%
• Induced Response 100%
• Micropatterning 100%
• Molar Ratio 16%
• Plate-like 16%
• Precursor Solution 16%
• Rutile 16%
• Successive Development 16%
• Toluene 16%

Engineering

• Beam Irradiation 100%
• Heat Treatment 50%
• Molar Ratio 50%
• Precursor Solution 50%
• Starting Material 50%

Material Science

• Bismuth 33%
• Ferroelectric Material 100%
• Film 100%
• Heat Treatment 33%
• Titanium 33%