TY - JOUR
T1 - Growth and characterization of β-FeSi2 thin films prepared by laser ablation method
AU - Kakemoto, H.
AU - Makita, Y.
AU - Sakuragi, S.
AU - Show, Y.
AU - Izumi, T.
AU - Sakata, I.
AU - Obara, A.
AU - Kobayashi, N.
AU - Ando, S.
AU - Tsukamoto, T.
N1 - Publisher Copyright:
© 1998 SPIE. All rights reserved.
PY - 1998/8/15
Y1 - 1998/8/15
N2 - Under ultra high vacuum, β-FeSi2 thin films were formed by laser ablation method using poly crystal β-FeSi2 as target material that was prepared by horizontal gradient freeze method. In order to compare the physical properties of thin films prepared by laser ablation with those of bulk crystal, β-FeSi2 single crystal was prepared by chemical vapor transport method. The β-FeSi2 plate-like and needle-like crystals were formed at 7 mg and 1 .0 g of iodine quantity, respectively. To check a crystal symmetry and orientation, Laue transmission patterns were taken. Anisotropic Raman signals were observed from polarized Raman scattering measurements. Further, electron spin resonance measurement was carried out to examine the residual impurities and to determine g values. From β-FeSi2 films during laser ablation growth, streaky signals were obtained in the RHEED observation. Highly oriented (202)/(220) β-FeSi2 films were predominantly identified in XRD measurements. Raman scattering and optical absorption measurements for these layers revealed that the grown samples are nearly epitaxially-like and have ∼0.85 eV as its direct optical band-gap.
AB - Under ultra high vacuum, β-FeSi2 thin films were formed by laser ablation method using poly crystal β-FeSi2 as target material that was prepared by horizontal gradient freeze method. In order to compare the physical properties of thin films prepared by laser ablation with those of bulk crystal, β-FeSi2 single crystal was prepared by chemical vapor transport method. The β-FeSi2 plate-like and needle-like crystals were formed at 7 mg and 1 .0 g of iodine quantity, respectively. To check a crystal symmetry and orientation, Laue transmission patterns were taken. Anisotropic Raman signals were observed from polarized Raman scattering measurements. Further, electron spin resonance measurement was carried out to examine the residual impurities and to determine g values. From β-FeSi2 films during laser ablation growth, streaky signals were obtained in the RHEED observation. Highly oriented (202)/(220) β-FeSi2 films were predominantly identified in XRD measurements. Raman scattering and optical absorption measurements for these layers revealed that the grown samples are nearly epitaxially-like and have ∼0.85 eV as its direct optical band-gap.
KW - ?-fesi2 film growth of on si (100) substrate
KW - ?-fesi2 needle-like crystal
KW - Arf excimer laser ablation
KW - Chemical vapor transport
KW - Raman scattering and optical absorption
UR - https://www.scopus.com/pages/publications/0001740819
U2 - 10.1117/12.317939
DO - 10.1117/12.317939
M3 - Conference article
AN - SCOPUS:0001740819
SN - 0277-786X
VL - 3550
SP - 129
EP - 140
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
T2 - Laser Processing of Materials and Industrial Applications II 1998
Y2 - 16 September 1998 through 19 September 1998
ER -