Fabrication of silicon based fuel cell electrodes by selective plasma etching

J. G.A. Brito-Neto, S. Araki, S. Shirako, M. Hayase

研究成果: Conference contribution査読

抄録

In this work, the fabrication of electrodes for silicon based fuel cells by plasma etching is reported. The fuel channels were opened by SF6 plasma etching through a copper mask after a porous platinum catalyst layer had been synthesized on the opposite side of the silicon wafer. Prototype cells were assembled by hot pressing two such electrodes with a polymer electrolyte membrane between them. Polarization curves for such cells were measured and a peak power density of 35 mW/cm2 was obtained when dry H2 and O2 were fed to the anode and cathode sides respectively. copyright The Electrochemical Society.

本文言語English
ホスト出版物のタイトルProton Exchange Membrane Fuel Cells 6
出版社Electrochemical Society Inc.
ページ479-482
ページ数4
1
ISBN(電子版)1566775019
DOI
出版ステータスPublished - 2006
イベントProton Exchange Membrane Fuel Cells 6 - 210th Electrochemical Society Meeting - Cancun, Mexico
継続期間: 29 10月 20063 11月 2006

出版物シリーズ

名前ECS Transactions
番号1
3
ISSN(印刷版)1938-5862
ISSN(電子版)1938-6737

Conference

ConferenceProton Exchange Membrane Fuel Cells 6 - 210th Electrochemical Society Meeting
国/地域Mexico
CityCancun
Period29/10/063/11/06

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