@inproceedings{de9d70922a274f7da92632e288565bac,
title = "Fabrication of silicon based fuel cell electrodes by selective plasma etching",
abstract = "In this work, the fabrication of electrodes for silicon based fuel cells by plasma etching is reported. The fuel channels were opened by SF6 plasma etching through a copper mask after a porous platinum catalyst layer had been synthesized on the opposite side of the silicon wafer. Prototype cells were assembled by hot pressing two such electrodes with a polymer electrolyte membrane between them. Polarization curves for such cells were measured and a peak power density of 35 mW/cm2 was obtained when dry H2 and O2 were fed to the anode and cathode sides respectively. copyright The Electrochemical Society.",
author = "Brito-Neto, {J. G.A.} and S. Araki and S. Shirako and M. Hayase",
year = "2006",
doi = "10.1149/1.2356169",
language = "English",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "1",
pages = "479--482",
booktitle = "Proton Exchange Membrane Fuel Cells 6",
edition = "1",
note = "Proton Exchange Membrane Fuel Cells 6 - 210th Electrochemical Society Meeting ; Conference date: 29-10-2006 Through 03-11-2006",
}