Fabrication of multilayered structure of silver nanorod arrays for plasmon memory

Keyphrases

• 3D Structure 33%
• Alignment Mark 33%
• Ambient Atmosphere 33%
• Efficient Production 16%
• Electron Beam Lithography 50%
• Fabrication Methods 16%
• High Efficiency 16%
• High-throughput 16%
• Lateral Angle 16%
• Lift-off 16%
• Metal Deposition 50%
• Metal Nanorods 16%
• Metal Nanostructures 66%
• Metal Pattern 16%
• Misalignment 16%
• Multilayered Structure 100%
• Nanoimprint Lithography 50%
• Nanopatterning 16%
• Nanorod Structure 16%
• Nanostructure Fabrication 16%
• Optical Data Storage 16%
• Optical Microscope 16%
• Plasmon 100%
• Plasmon Resonance 16%
• Plasmonic Devices 16%
• Resin Layer 16%
• Silver Ink 50%
• Silver Nanorod Arrays 100%
• Storage Media 33%
• Three-dimensional Optical Storage 16%

Material Science

• Lithography 100%
• Metal Deposition 50%
• Nanorod 100%
• Nanostructure 66%
• Silver 100%