Fabrication of low line edge roughness mold by SOG replica method

Y. Kurashima; H. Hiroshima; M. Komuro; N. Yamazaki; J. Taniguchi; I. Miyamoto

doi:10.1109/imnc.2004.245725

Fabrication of low line edge roughness mold by SOG replica method

Y. Kurashima, H. Hiroshima, M. Komuro, N. Yamazaki, J. Taniguchi, I. Miyamoto

電子システム工学科

研究成果: Conference contribution › 査読

本文言語	English
ホスト出版物のタイトル	Digest of Papers - Microprocesses and Nanotechnology 2004
出版社	The Japan Society of Applied Physics
ページ	66-67
ページ数	2
ISBN（印刷版）	4990247205, 9784990247201
DOI	https://doi.org/10.1109/imnc.2004.245725
出版ステータス	Published - 2004
イベント	2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan 継続期間: 26 10月 2004 → 29 10月 2004

出版物シリーズ

名前	Digest of Papers - Microprocesses and Nanotechnology 2004

Conference

Conference	2004 International Microprocesses and Nanotechnology Conference
国/地域	Japan
City	Osaka
Period	26/10/04 → 29/10/04

文献へのアクセス

10.1109/imnc.2004.245725

他のファイルとリンク

Scopusの出版物のリンク

引用スタイル

Kurashima, Y., Hiroshima, H., Komuro, M., Yamazaki, N., Taniguchi, J., & Miyamoto, I. (2004). Fabrication of low line edge roughness mold by SOG replica method. In Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 66-67). 記事 28A-5-1 (Digest of Papers - Microprocesses and Nanotechnology 2004). The Japan Society of Applied Physics. https://doi.org/10.1109/imnc.2004.245725

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author = "Y. Kurashima and H. Hiroshima and M. Komuro and N. Yamazaki and J. Taniguchi and I. Miyamoto",

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language = "English",

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Kurashima, Y, Hiroshima, H, Komuro, M, Yamazaki, N, Taniguchi, J & Miyamoto, I 2004, Fabrication of low line edge roughness mold by SOG replica method. in Digest of Papers - Microprocesses and Nanotechnology 2004., 28A-5-1, Digest of Papers - Microprocesses and Nanotechnology 2004, The Japan Society of Applied Physics, pp. 66-67, 2004 International Microprocesses and Nanotechnology Conference, Osaka, Japan, 26/10/04. https://doi.org/10.1109/imnc.2004.245725

TY - GEN

T1 - Fabrication of low line edge roughness mold by SOG replica method

AU - Kurashima, Y.

AU - Hiroshima, H.

AU - Komuro, M.

AU - Yamazaki, N.

AU - Taniguchi, J.

AU - Miyamoto, I.

PY - 2004

Y1 - 2004

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U2 - 10.1109/imnc.2004.245725

DO - 10.1109/imnc.2004.245725

M3 - Conference contribution

AN - SCOPUS:23244447883

SN - 4990247205

SN - 9784990247201

T3 - Digest of Papers - Microprocesses and Nanotechnology 2004

SP - 66

EP - 67

BT - Digest of Papers - Microprocesses and Nanotechnology 2004

PB - The Japan Society of Applied Physics

T2 - 2004 International Microprocesses and Nanotechnology Conference

Y2 - 26 October 2004 through 29 October 2004

ER -