Fabrication of ferroelectric Pb(Zr,Ti)O3 thin films with various Zr/Ti ratios by ink-jet printing

Soichiro Okamura, Rie Takeuchi, Tadashi Shiosaki

研究成果: Article

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Ferroelectric Pb(Zr,Ti)O3 (PZT) thin films with various Zr/Ti ratios were fabricated by ink-jet printing (IJP). Two kinds of precursor solutions for PbTiO3 (PT) and PbZrO3 (PZ) were prepared from Pb(OCOCH3)2 ·3H2O, Ti[OCH(CH 3)2]4 and Zr(OC4H9) 4. Seven 1 × 1 cm2 square patterns with mixing ratios PT: PZ = 6: 0, 5: 1, 4: 2, 3: 3, 2: 4, 1: 5 and 0: 6 were formed on a 3-inch Pt/Ti/SiO2/Si substrate by overlapped printing. After printing, they were dried at 110°C for 10 min, calcined at 350°C for 10 min and finally sintered at 650°C for 30 min. The d-space corresponding to the (001) plane in the tetragonal phase estimated from X-ray diffraction (XRD) peaks first decreased, then increased and finally decreased again with increasing Zr-content, while the d-space corresponding to the (100) or (010) plane monotonically increased with increasing Zr-content. This suggests that the crystal structure of PZT thin films changed from tetragonal to rhombohedral to orthorhombic with increasing Zr-content.

ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
発行部数11 B
出版物ステータスPublished - 1 11 2002

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