Fabrication of bulk diamond field emitter tip using beam assisted etching

Jun Taniguchi, Masanori Komuro, Hiroshi Hiroshima, Iwao Miyamoto

研究成果: Conference contribution査読

抄録

We fabricated a bulk diamond field emitter tip using focused ion beam assisted etching : and investigated characteristics of electron emission from bulk diamond. Electron emission from bulk diamond is field emission. FIB assisted khing is very useful to reduce emission site.

本文言語English
ホスト出版物のタイトルDigest of Papers - Microprocesses and Nanotechnology 1998
ホスト出版物のサブタイトル1998 International Microprocesses and Nanotechnology Conference
編集者Hyung Joon Yoo, Shinji Okazaki, Jinho Ahn, Ohyun Kim, Masanori Komuro
出版社Institute of Electrical and Electronics Engineers Inc.
ページ198-199
ページ数2
ISBN(電子版)4930813832, 9784930813831
DOI
出版ステータスPublished - 1998
イベント1998 International Microprocesses and Nanotechnology Conference, MNC 1998 - Kyoungju, Korea, Republic of
継続期間: 13 7月 199816 7月 1998

出版物シリーズ

名前Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference
1998-July

Conference

Conference1998 International Microprocesses and Nanotechnology Conference, MNC 1998
国/地域Korea, Republic of
CityKyoungju
Period13/07/9816/07/98

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