TY - JOUR
T1 - Development of a compact FE-SEM and X-ray microscope with a carbon nanotube electron source
AU - Irita, M.
AU - Yamazaki, S.
AU - Nakahara, H.
AU - Saito, Y.
N1 - Funding Information:
The authors also thank H. Murata, Meijo University for paraxial trajectory calculations and T. Ohno, Technex Lab Co. for valuable advice on modification of the Tiny SEM. The authors acknowledge the financial support from the Ministry of Education, Culture, Sports, Science and Technology of Japan (Grant-in-Aid for Scientific Research (B), No. 25286024).
Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2018/1/25
Y1 - 2018/1/25
N2 - A carbon nanotube (CNT) possesses various benefits as a field electron emitter. Multi-walled CNT (MWNT) have exhibited high brightness and the field emission (FE) current is stable even under poor high-vacuum condition of 10-6 - 10-7 Pa without ion pumping. In this study, we have experimentally manufactured a compact composite field emission scanning electron microscope (FE-SEM) and X-ray microscope (XRM) with a single isolated MWNT electron source. An electron beam from a MWNT was focussed and accelerated by a Butler electrostatic lens. Stable SEM images were observed at a Butler voltage V but = 1.5 kV and accelerating voltage V acc ≃ 15 kV with a focussed probe current I foc = 61 pA. The spatial resolution of the SEM, which was estimated from 80 - 20 % edge profile of polystyrene latex spheres, was about 9 nm. XRM images were acquired by 30-min exposure at V but = 1.5 kV and V acc ≃ 17 kV. A spatial resolution of about 200 nm was obtained for XRM. The present results prove the high performance of the compact FE-SEM and XRM using a single isolated MWNT electron source at 10-7 Pa.
AB - A carbon nanotube (CNT) possesses various benefits as a field electron emitter. Multi-walled CNT (MWNT) have exhibited high brightness and the field emission (FE) current is stable even under poor high-vacuum condition of 10-6 - 10-7 Pa without ion pumping. In this study, we have experimentally manufactured a compact composite field emission scanning electron microscope (FE-SEM) and X-ray microscope (XRM) with a single isolated MWNT electron source. An electron beam from a MWNT was focussed and accelerated by a Butler electrostatic lens. Stable SEM images were observed at a Butler voltage V but = 1.5 kV and accelerating voltage V acc ≃ 15 kV with a focussed probe current I foc = 61 pA. The spatial resolution of the SEM, which was estimated from 80 - 20 % edge profile of polystyrene latex spheres, was about 9 nm. XRM images were acquired by 30-min exposure at V but = 1.5 kV and V acc ≃ 17 kV. A spatial resolution of about 200 nm was obtained for XRM. The present results prove the high performance of the compact FE-SEM and XRM using a single isolated MWNT electron source at 10-7 Pa.
UR - http://www.scopus.com/inward/record.url?scp=85041687165&partnerID=8YFLogxK
U2 - 10.1088/1757-899X/304/1/012006
DO - 10.1088/1757-899X/304/1/012006
M3 - Conference article
AN - SCOPUS:85041687165
SN - 1757-8981
VL - 304
JO - IOP Conference Series: Materials Science and Engineering
JF - IOP Conference Series: Materials Science and Engineering
IS - 1
M1 - 012006
T2 - 15th European Workshop on Modern Developments and Applications in Microbeam Analysis, EMAS 2017 and 7th Meeting of the International Union of Microbeam Analysis Societies, IUMAS 2017
Y2 - 7 May 2017 through 11 May 2017
ER -