Controlling the structure and composition of SnO₂-based thin film with reactive sputtering to improve the sensitivity of semiconductor CO₂ sensor

Keyphrases

• Semiconductors 100%
• Surface Structure 100%
• Reactive Sputtering 100%
• CO2 Sensor 100%
• SnO2-based 100%
• SnO2 66%
• Heterojunction 66%
• Gas Sensor 66%
• SnO2 Thin Films 66%
• Gas Adsorption 33%
• P-type 33%
• Large Surface Area 33%
• Adsorption Capacity 33%
• Surface Composition 33%
• Oxygen Partial Pressure 33%
• Deposition Process 33%
• Heterojunction Interface 33%
• Structure Ratio 33%
• Composition Ratio 33%
• SnO2 Film 33%
• Valuable Insight 33%
• CO Detection 33%
• CO2 Gas Sensor 33%

Material Science

• Thin Films 100%
• Carbon Dioxide 100%
• Surface Structure 100%
• Heterojunction 75%
• Gas Sensor 75%
• Film 25%

Chemical Engineering

• Carbon Dioxide 100%
• Reactive Sputtering 100%
• Film 100%
• Gas Adsorption 20%