Beam-assisted-etching technique for fabrication of single crystal diamond field emitter tip

J. Taniguchi; J. Yokoyama; M. Komuro; H. Hiroshima; I. Miyamoto

doi:10.1016/S0167-9317(00)00346-4

Beam-assisted-etching technique for fabrication of single crystal diamond field emitter tip

J. Taniguchi, J. Yokoyama, M. Komuro, H. Hiroshima, I. Miyamoto

電子システム工学科

研究成果: Conference article › 査読

9 被引用数 (Scopus)

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We fabricated a single crystal diamond field emitter tip using focused ion beam assisted etching and investigated characteristics of electron emission from single crystal diamond. Electron emission from single crystal diamond is field emission. FIB assisted etching is very useful to reduce emission site.

本文言語	English
ページ（範囲）	415-418
ページ数	4
ジャーナル	Microelectronic Engineering
巻	53
号	1
DOI	https://doi.org/10.1016/S0167-9317(00)00346-4
出版ステータス	Published - 6月 2000
イベント	25th International Conference on Micro- and Nano-Engineering - Rome, Italy 継続期間: 21 9月 1999 → 23 9月 1999

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10.1016/S0167-9317(00)00346-4

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title = "Beam-assisted-etching technique for fabrication of single crystal diamond field emitter tip",

abstract = "We fabricated a single crystal diamond field emitter tip using focused ion beam assisted etching and investigated characteristics of electron emission from single crystal diamond. Electron emission from single crystal diamond is field emission. FIB assisted etching is very useful to reduce emission site.",

author = "J. Taniguchi and J. Yokoyama and M. Komuro and H. Hiroshima and I. Miyamoto",

year = "2000",

month = jun,

doi = "10.1016/S0167-9317(00)00346-4",

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TY - JOUR

T1 - Beam-assisted-etching technique for fabrication of single crystal diamond field emitter tip

AU - Taniguchi, J.

AU - Yokoyama, J.

AU - Komuro, M.

AU - Hiroshima, H.

AU - Miyamoto, I.

PY - 2000/6

Y1 - 2000/6

N2 - We fabricated a single crystal diamond field emitter tip using focused ion beam assisted etching and investigated characteristics of electron emission from single crystal diamond. Electron emission from single crystal diamond is field emission. FIB assisted etching is very useful to reduce emission site.

AB - We fabricated a single crystal diamond field emitter tip using focused ion beam assisted etching and investigated characteristics of electron emission from single crystal diamond. Electron emission from single crystal diamond is field emission. FIB assisted etching is very useful to reduce emission site.

UR - http://www.scopus.com/inward/record.url?scp=0034206451&partnerID=8YFLogxK

U2 - 10.1016/S0167-9317(00)00346-4

DO - 10.1016/S0167-9317(00)00346-4

M3 - Conference article

AN - SCOPUS:0034206451

SN - 0167-9317

VL - 53

SP - 415

EP - 418

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 1

T2 - 25th International Conference on Micro- and Nano-Engineering

Y2 - 21 September 1999 through 23 September 1999

ER -

Beam-assisted-etching technique for fabrication of single crystal diamond field emitter tip

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