A novel device for fixing small objects using through-pore porous silicon

Atsuko Kato, Atsushi Uchiumi, Masanori Hayase

研究成果: Conference contribution査読

1 被引用数 (Scopus)

抄録

A novel device that enables fixing small objects at a specified point on a Si substrate was developed. It will be useful if cell or other small objects can be fixed in a row on a chip and drug dosage to the each object can be controlled. By arranging objects in a row, observation will become easy and quick. Amount of drug usage is also expected to be reduced. It is known that mono crystalline Si becomes porous by anodization in a HF solution and through-pore porous Si region can be formed. By making the through-pore porous region on a specified area, objects can be fixed on the specified area by vacuum suction from the back side of the chip. In this study, patterned through-pore porous Si areas were made on a Si chip. It was observed that a polystyrene bead was fixed on a through-pore porous area of 7μm × 7μm.

本文言語English
ホスト出版物のタイトルTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
ページ731-734
ページ数4
DOI
出版ステータスPublished - 1 12月 2007
イベント4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
継続期間: 10 6月 200714 6月 2007

出版物シリーズ

名前TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
国/地域France
CityLyon
Period10/06/0714/06/07

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