@inproceedings{8ebf9abc48ee463faba685993a59441d,
title = "A novel device for fixing small objects using through-pore porous silicon",
abstract = "A novel device that enables fixing small objects at a specified point on a Si substrate was developed. It will be useful if cell or other small objects can be fixed in a row on a chip and drug dosage to the each object can be controlled. By arranging objects in a row, observation will become easy and quick. Amount of drug usage is also expected to be reduced. It is known that mono crystalline Si becomes porous by anodization in a HF solution and through-pore porous Si region can be formed. By making the through-pore porous region on a specified area, objects can be fixed on the specified area by vacuum suction from the back side of the chip. In this study, patterned through-pore porous Si areas were made on a Si chip. It was observed that a polystyrene bead was fixed on a through-pore porous area of 7μm × 7μm.",
keywords = "Anodization, MEMS, Porous si, Vacuum suction",
author = "Atsuko Kato and Atsushi Uchiumi and Masanori Hayase",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/SENSOR.2007.4300234",
language = "English",
isbn = "1424408423",
series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "731--734",
booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",
}