@inproceedings{f4aff6f608614f2eb8ad143da6492dc7,
title = "A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps",
abstract = "This paper proposes a magnetic actuator using a partially magnetized FePt thick film as a permanent magnet and membrane material for bi-directional micropumps. The magnetized areas act as flux sources, while the magnetized and unmagnetized areas play a role of the membrane part. The mechanical and magnetic characterization results show FePt has a large tensile strength and a lower Young's modulus than Si crystal, and a comparable remanence to NdFeB. A magnetic pattern transfer technique with a post thermal demagnetization is proposed and experimentally verified to magnetize the FePt partially. Using the proposed magnetic actuator with partially magnetized FePt film is beneficial to simplify the complicated structure and fabrication process of the bi-directional magnetic micropump besides other magnetic MEMS devices.",
keywords = "FePt Thick Film, Magnetic Actuator, Magnetic MEMS, Micropump",
author = "Chao Qi and Keita Nagai and Ming Ji and Yu Miyahara and Naohiro Sugita and Tadahiko Shinshi and Masaki Nakano and Chiaki Sato",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022 ; Conference date: 12-12-2022 Through 15-12-2022",
year = "2022",
doi = "10.1109/PowerMEMS56853.2022.10007558",
language = "English",
series = "2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "309--310",
booktitle = "2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022",
}