谷口 淳

研究成果

年別の研究成果 1995 2005 2006 2009 2010 2013 2015 2016 2018 2020 2024

• 200 Article
• 35 Conference contribution
• 21 Paper
• 5 Chapter
• 11 その他
  • 5 Conference article
  • 3 Review article
  • 1 Book
  • 1 Foreword/postscript
  • 1 Editorial

年別の研究成果

年別の研究成果

検索結果

• 2019

  3D nanofabrication using controlled-acceleration-voltage electron beam lithography with nanoimprinting technology

  Unno, N. & Taniguchi, J., 1 6月 2019, In: Advanced Optical Technologies. 8, 3-4, p. 253-266 14 p.

  研究成果: Review article › 査読

  • Three-dimensional Nanofabrication 100%
  • Accelerating Voltage 100%
  • Electron Beam Lithography 100%
  • Nanoimprint 100%
  • Nanofabrication Process 100%
  6 被引用数 (Scopus)

• Fabrication of bio-inspired 3D nanoimprint mold using acceleration-voltage-modulation electron-beam lithography

  Goto, K. & Taniguchi, J., 26 6月 2019, In: Advanced Optical Technologies. 8, 3-4, p. 289-297 9 p.

  研究成果: Review article › 査読

  Open Access

  • Accelerating Voltage 100%
  • Three-dimensional (3D) 100%
  • Electron Beam Lithography 100%
  • Nanoimprint Mold 100%
  • Bio-inspired 100%
  1 被引用数 (Scopus)
• 2006

  Fabrication of three-dimensional hydrogen silsesquioxane resist structure using electron beam lithography

  Matsubara, Y., Taniguchi, J. & Miyamoto, I., 20 6月 2006, In: Japanese Journal of Applied Physics. 45, 6 B, p. 5538-5541 4 p.

  研究成果: Review article › 査読

  • Three-dimensional (3D) 100%
  • Electron Beam Lithography 100%
  • Hydrogen Silsesquioxane 100%
  • Lithography 100%
  • Silsesquioxane 100%
  26 被引用数 (Scopus)