@article{a227a0ff5f6949638730355a1bc164f7,
title = "Synthesis of Cubic Boron Nitride Film by an RF Plasma CVD Method",
keywords = "RF plasma CVD, activated hydrogen, cubic boron nitride, cyclotriborazane: (BH2NH2)3, hexagonal boron nitride, infrared absorption spectra",
author = "Takashi Ishiguro and Hidetoshi Saitoh and Yukio Ichinose",
year = "1987",
month = jan,
doi = "10.2493/jjspe.53.1527",
language = "English",
volume = "53",
pages = "1527--1531",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "10",
}