Keyphrases
Epitaxial
100%
Structural Characterization
100%
Low Temperature Sputtering
100%
Aluminum Scandium Nitride (AlScN)
100%
ScAlN Film
100%
Lattice Constant
50%
Ferroelectric Properties
25%
Physical Properties
25%
Electronic Devices
25%
C-axis
25%
Piezoelectric Properties
25%
Device Application
25%
High-resolution X-ray Diffraction (HRXRD)
25%
Machine Learning Models
25%
Constant Strain
25%
Reciprocal Space Mapping
25%
Machine Learning Analysis
25%
Valuable Insight
25%
Mapping Learning
25%
Coherent Growth
25%
Structural Attributes
25%
Film Strain
25%
Material Science
Film
100%
Lattice Constant
66%
Ferroelectricity
33%
Piezoelectric Property
33%
Physical Property
33%
High Resolution X-Ray Diffraction
33%
Chemical Engineering
Film
100%
Learning System
66%