Structural and ferroelectric properties of sputter-epitaxial ScAlN on GaN grown at various temperatures
- Sawaki Sato
- , Yusuke Wakamoto
- , Takuya Maeda
- , Hiroshi Funakubo
- , Kohei Ueno
- , Hiroshi Fujioka
- , Kazuhisa Ikeda
- , Atsushi Kobayashi
Research output: Contribution to journal › Article › peer-review
2
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(Scopus)