TY - JOUR
T1 - Profile control of silicon moth-eye structures for terahertz antireflection fabricated by femtosecond laser processing
AU - Yu, Xi
AU - Yasunaga, Yuki
AU - Goto, Kazusa
AU - Liu, Dejun
AU - Kuwahara, Makoto
AU - Ono, Shingo
N1 - Publisher Copyright:
© IEEE 2022.
PY - 2022
Y1 - 2022
N2 - Micro tapers with different profiles were fabricated by using femtosecond laser processing, and these tapers were employed to constitute moth-eye structures for terahertz frequencies. The relationship between profiles and antireflective performance is quantitatively analyzed.
AB - Micro tapers with different profiles were fabricated by using femtosecond laser processing, and these tapers were employed to constitute moth-eye structures for terahertz frequencies. The relationship between profiles and antireflective performance is quantitatively analyzed.
UR - http://www.scopus.com/inward/record.url?scp=85166479440&partnerID=8YFLogxK
U2 - 10.1364/CLEOPR.2022.CTuP3D_04
DO - 10.1364/CLEOPR.2022.CTuP3D_04
M3 - Conference article
AN - SCOPUS:85166479440
SN - 2162-2701
JO - Optics InfoBase Conference Papers
JF - Optics InfoBase Conference Papers
T2 - 2022 Conference on Lasers and Electro-Optics Pacific Rim, CLEO/PR 2022
Y2 - 31 August 2022 through 5 September 2022
ER -