Photo-curable resins and the evaluation methods for UV-nanoimprint lithograohy

Tamano Hirasawa, Jun Taniguchi, Makoto Ohtaguchi, Nobuji Sakai

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4 Citations (Scopus)

Abstract

we prepared five kinds of photo-curable resins, and conducted evaluation experiments for their thermal properties, mechanical roperties, and application availability for the imprint process. Measurements of thermal properties using the TG method, TM-DSC method, and laser interferometric method were studied. From these measurements, it was found that the measurements of the thermally stable temperature, glass-transition temperature, and linear expansion coefficient of the resins were possible. Also, measurements of mechanical properties using the nano indentation were studied. In this method, the measurements of Young's modulus of the thin resin film on the substrate were possible. With respect to application availability for the imprint process, we investigated effects of the mold release treatment and their durability for two kinds of resins by measuring their adhesive force. It was observed that the difference in durability of mold release treatment effects depends on the resin type.

Original languageEnglish
Pages (from-to)174-178
Number of pages5
JournalIEEJ Transactions on Electronics, Information and Systems
Volume127
Issue number2
DOIs
Publication statusPublished - 1 Jan 2007

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Keywords

  • Adhesive force
  • Glass-transition temperature
  • Mold
  • Photo-curable resin
  • UV-nanoimprint

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