Performance of SOI Pixel Sensors Developed for X-ray Astronomy

Takaaki Tanaka, Takeshi Go Tsuru, Hiroyuki Uchida, Sodai Harada, Tomoyuki Okuno, Kazuho Kayama, Yuki Amano, Hideaki Matsumura, Ayaki Takeda, Koji Mori, Yusuke Nishioka, Kohei Fukuda, Takahiro Hida, Masataka Yukumoto, Yasuo Arai, Ikuo Kurachi, Shoji Kawahito, Keiichiro Kagawa, Keita Yasutomi, Sumeet ShresthaSyunta Nakanishi, Hiroki Kamehama, Takayoshi Kohmura, Kouichi Hagino, Kousuke Negishi, Kenji Oono, Keigo Yarita

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We have been developing monolithic active pixel sensors for X-rays based on the silicon-on-insulator technology. Our device consists of a low-resistivity Si layer for readout CMOS electronics, a high-resistivity Si sensor layer, and a SiO2 layer between them. This configuration allows us both high-speed readout circuits and a thick (on the order of 100 m) depletion layer in a monolithic device. Each pixel circuit contains a trigger output function, with which we can achieve a time resolution of ≲ 10 s. One of our key development items is improvement of the energy resolution. We recently fabricated a device named XRPIX6E, to which we introduced a pinned depleted diode (PDD) structure. The structure reduces the capacitance coupling between the sensing area in the sensor layer and the pixel circuit, which degrades the spectral performance. With XRPIX6E, we achieve an energy resolution of ~ 150 eV in full width at half maximum for 6.4-keV X-rays. In addition to the good energy resolution, a large imaging area is required for practical use. We developed and tested XRPIX5b, which has an imaging area size of 21.9 mm 13.8 mm and is the largest device that we ever fabricated. We successfully obtain X-ray data from almost all the 608 384 pixels with high uniformity.

Original languageEnglish
Title of host publication2018 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2018 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538684948
DOIs
Publication statusPublished - Nov 2018
Event2018 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2018 - Sydney, Australia
Duration: 10 Nov 201817 Nov 2018

Publication series

Name2018 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2018 - Proceedings

Conference

Conference2018 IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2018
CountryAustralia
CitySydney
Period10/11/1817/11/18

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