O2 gas pressure effects on surface morphology in ferroelectric Bi4Ti3O12 thin films fabricated by spin-coating pyrolysis

Atsushi Kakimi, Soichiro Okamura, Takeyo Tsukamoto

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Abstract

Fabrication of ferroelectric Bi4Ti3O12 thin films was carried out by spin-coating pyrolysis of Bi and Ti naphthenates and successive heat treatments in O2 gas. Heat treatments in O2 gas were effective for fabrication of ferroelectric Bi4Ti3O12 thin films with oaxis orientation. It was confirmed that the film surface morphology strongly depends on the O2 gas pressure. Smooth platelike grains of the size greater than 10 × 10 μm2 formed extensively in thin films upon heat treatment at the O2 gas pressure of 4.0 × 105 Pa. The film thickness was 500 nm. The thin film was a single phase of Bi4Ti3O12 completely oriented along the c-axis with good ferroelectric properties at room temperature: coercive field of 15 kV/cm, remanent polarization of 1.9 μC/cm2, dielectric constant of 43 and loss of 0.02.

Original languageEnglish
Pages (from-to)L1707-L1709
JournalJapanese Journal of Applied Physics
Volume33
Issue number12 A
DOIs
Publication statusPublished - 1 Jan 1994

Keywords

  • BiTiO
  • Ferroelectric
  • Metal naphthenate
  • O gas pressure
  • Spin-coating pyrolysis
  • Thin film

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