Optimization of processing condition for deposition of DLC using FIB-CVD method

Naomichi Sakamoto; Yasuo Kogo; Takahiro Yagi; Takuya Yasuno; Jun Taniguchi; Iwao Miyamoto

Optimization of processing condition for deposition of DLC using FIB-CVD method

Naomichi Sakamoto, Yasuo Kogo, Takahiro Yagi, Takuya Yasuno, Jun Taniguchi, Iwao Miyamoto

Research output: Contribution to conference › Paper › peer-review

Abstract

The processing conditions of DLC using the FIB-CVD method were examined in detail and were optimized. Microstructures and mechanical properties of DLC were also investigated. The deposition experiments with changing processing conditions indicated that the rate-determining steps of the deposition rate were varied by the probe current and heating temperature of phenanthrene. HRTEM and diffraction images showed that the DLC had amorphous structures. Young's modulus and Vickers hardness were in the range of 110-140 GPa and 1100-1400 HV, respectively. These mechanical properties were obtained similarly even though the deposition conditions were changed in our study.

Original language	English
Pages	811-816
Number of pages	6
Publication status	Published - 1 Dec 2005
Event	3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005 - Nagoya, Japan Duration: 19 Oct 2005 → 22 Oct 2005

Conference

Conference	3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005
Country/Territory	Japan
City	Nagoya
Period	19/10/05 → 22/10/05

Keywords

Chemical vapor deposition
Diamond-like carbon
Focused ion-beam
High-resolution transmission electron microscopy
Mechanical properties

Cite this

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title = "Optimization of processing condition for deposition of DLC using FIB-CVD method",

abstract = "The processing conditions of DLC using the FIB-CVD method were examined in detail and were optimized. Microstructures and mechanical properties of DLC were also investigated. The deposition experiments with changing processing conditions indicated that the rate-determining steps of the deposition rate were varied by the probe current and heating temperature of phenanthrene. HRTEM and diffraction images showed that the DLC had amorphous structures. Young's modulus and Vickers hardness were in the range of 110-140 GPa and 1100-1400 HV, respectively. These mechanical properties were obtained similarly even though the deposition conditions were changed in our study.",

keywords = "Chemical vapor deposition, Diamond-like carbon, Focused ion-beam, High-resolution transmission electron microscopy, Mechanical properties",

author = "Naomichi Sakamoto and Yasuo Kogo and Takahiro Yagi and Takuya Yasuno and Jun Taniguchi and Iwao Miyamoto",

year = "2005",

month = dec,

day = "1",

language = "English",

pages = "811--816",

note = "3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005 ; Conference date: 19-10-2005 Through 22-10-2005",

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TY - CONF

T1 - Optimization of processing condition for deposition of DLC using FIB-CVD method

AU - Sakamoto, Naomichi

AU - Kogo, Yasuo

AU - Yagi, Takahiro

AU - Yasuno, Takuya

AU - Taniguchi, Jun

AU - Miyamoto, Iwao

PY - 2005/12/1

Y1 - 2005/12/1

N2 - The processing conditions of DLC using the FIB-CVD method were examined in detail and were optimized. Microstructures and mechanical properties of DLC were also investigated. The deposition experiments with changing processing conditions indicated that the rate-determining steps of the deposition rate were varied by the probe current and heating temperature of phenanthrene. HRTEM and diffraction images showed that the DLC had amorphous structures. Young's modulus and Vickers hardness were in the range of 110-140 GPa and 1100-1400 HV, respectively. These mechanical properties were obtained similarly even though the deposition conditions were changed in our study.

AB - The processing conditions of DLC using the FIB-CVD method were examined in detail and were optimized. Microstructures and mechanical properties of DLC were also investigated. The deposition experiments with changing processing conditions indicated that the rate-determining steps of the deposition rate were varied by the probe current and heating temperature of phenanthrene. HRTEM and diffraction images showed that the DLC had amorphous structures. Young's modulus and Vickers hardness were in the range of 110-140 GPa and 1100-1400 HV, respectively. These mechanical properties were obtained similarly even though the deposition conditions were changed in our study.

KW - Chemical vapor deposition

KW - Diamond-like carbon

KW - Focused ion-beam

KW - High-resolution transmission electron microscopy

KW - Mechanical properties

UR - http://www.scopus.com/inward/record.url?scp=84883700984&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:84883700984

SP - 811

EP - 816

T2 - 3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005

Y2 - 19 October 2005 through 22 October 2005

ER -

Optimization of processing condition for deposition of DLC using FIB-CVD method

Abstract

Conference

Keywords

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