TY - GEN
T1 - Nd-Fe-B films prepared by low temperature process
AU - Higashi, Kosuke
AU - Fukuda, Itsuki
AU - Yamashita, Akihiro
AU - Yanai, Takeshi
AU - Fukunaga, Hirotoshi
AU - Nagai, Keita
AU - Shinshi, Tadahiko
AU - Nakhano, Masaki
N1 - Publisher Copyright:
© 2023 IEEE.
PY - 2023
Y1 - 2023
N2 - Although sputtering-fabricated Nd-Fe-B films have been reported to achieve excellent magnetic properties, the films require an annealing process such as substrate heating and/or post annealing. This study focuses on Nd-Fe-B films' preparation by low temperature process. In detail, laser-induced forward transfer technique using two targets (target A: pulsed laser deposition-fabricated Nd-Fe-B films, target B: Nd-Fe-B sintered magnets) were conducted. Fundamental properties were examined for the films prepared by each target in the study.
AB - Although sputtering-fabricated Nd-Fe-B films have been reported to achieve excellent magnetic properties, the films require an annealing process such as substrate heating and/or post annealing. This study focuses on Nd-Fe-B films' preparation by low temperature process. In detail, laser-induced forward transfer technique using two targets (target A: pulsed laser deposition-fabricated Nd-Fe-B films, target B: Nd-Fe-B sintered magnets) were conducted. Fundamental properties were examined for the films prepared by each target in the study.
KW - laser-induced forward transfer
KW - low temperature process
KW - micro electro mechanical systems
KW - Nd-Fe-B films
UR - http://www.scopus.com/inward/record.url?scp=85177166493&partnerID=8YFLogxK
U2 - 10.1109/INTERMAGShortPapers58606.2023.10305061
DO - 10.1109/INTERMAGShortPapers58606.2023.10305061
M3 - Conference contribution
AN - SCOPUS:85177166493
T3 - 2023 IEEE International Magnetic Conference - Short Papers, INTERMAG Short Papers 2023 - Proceedings
BT - 2023 IEEE International Magnetic Conference - Short Papers, INTERMAG Short Papers 2023 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2023 IEEE International Magnetic Conference - Short Papers, INTERMAG Short Papers 2023
Y2 - 15 May 2023 through 19 May 2023
ER -