TY - JOUR
T1 - Miniature fuel cell with monolithically fabricated Si electrodes-uniformity of catalyst layer thickness -
AU - Morisawa, Itsuki
AU - Suzuki, Takahiro
AU - Katayama, Noboru
AU - Dowaki, Kiyoshi
AU - Hayase, Masanori
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2014
Y1 - 2014
N2 - Uniformity of catalyst layer thickness was improved to obtained higher output with our miniature fuel cells. Though the miniature fuel cells demonstrated high power density about 500mW/cm2 with 1 mm2 reaction area, it was difficult to maintain the power density with larger reaction area and careful observation of the prototypes revealed that the porous Si layer, which should be etched away completely, remained on the channel bottoms. Nonuniform porous Pt catalyst layer thickness was suspicious for the residual porous Si, and rotation of the plating vessel in the Pt deposition process was performed to mitigate variation of the catalyst layer thickness. Though the power density was still low with larger reaction area, the larger output was successfully obtained with the vessel rotation.
AB - Uniformity of catalyst layer thickness was improved to obtained higher output with our miniature fuel cells. Though the miniature fuel cells demonstrated high power density about 500mW/cm2 with 1 mm2 reaction area, it was difficult to maintain the power density with larger reaction area and careful observation of the prototypes revealed that the porous Si layer, which should be etched away completely, remained on the channel bottoms. Nonuniform porous Pt catalyst layer thickness was suspicious for the residual porous Si, and rotation of the plating vessel in the Pt deposition process was performed to mitigate variation of the catalyst layer thickness. Though the power density was still low with larger reaction area, the larger output was successfully obtained with the vessel rotation.
UR - http://www.scopus.com/inward/record.url?scp=84915756212&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/557/1/012108
DO - 10.1088/1742-6596/557/1/012108
M3 - Conference article
AN - SCOPUS:84915756212
SN - 1742-6588
VL - 557
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012108
T2 - 14th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications, PowerMEMS 2014
Y2 - 18 November 2014 through 21 November 2014
ER -