Micropatterning process of ferroelectric oxides by irradiation of an electron beam on metal naphthenate films

Soichiro Okamura; Atsushi Kakimi; Yukie Yagi; Katsumi Mori; Takeyo Tsukamoto

Micropatterning process of ferroelectric oxides by irradiation of an electron beam on metal naphthenate films

Soichiro Okamura, Atsushi Kakimi, Yukie Yagi, Katsumi Mori, Takeyo Tsukamoto

Department of Applied Physics

Research output: Contribution to conference › Paper › peer-review

1 Citation (Scopus)

Abstract

Fine micropatterns with linewidth of 0.35 μm were fabricated by irradiation of an electron beam on metal naphthenate films being precursors of ferroelectric oxide and development with a solvent. Relatively large patterns were crystallized into the single phase Bi₄Ti₃O₁₂ with c-axis orientation by successive heat-treatment at 800 °C. Micropatterns with linewidth of 1 μm were crystallized into single crystals and their volume was reduced to 15% by the heat-treatment. PZT and Bi₄Ti₃O₁₂ thin films formed by the dipping pyrolysis method, which is the base of this patterning process, exhibited good ferroelectric properties; the remanent polarization P_r and the coercive field E_c were 24 μC/cm² and 39 kV/cm for PZT, and 1.6 μC/cm² and 24 kV/cm for Bi₄Ti₃O₁₂, respectively.

Original language	English
Pages	62-65
Number of pages	4
Publication status	Published - 1994
Event	Proceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics - University Park, PA, USA Duration: 7 Aug 1994 → 10 Aug 1994

Conference

Conference	Proceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics
City	University Park, PA, USA
Period	7/08/94 → 10/08/94

Cite this

@conference{91b0a483f1614a6bb29142e142094dcf,

title = "Micropatterning process of ferroelectric oxides by irradiation of an electron beam on metal naphthenate films",

abstract = "Fine micropatterns with linewidth of 0.35 μm were fabricated by irradiation of an electron beam on metal naphthenate films being precursors of ferroelectric oxide and development with a solvent. Relatively large patterns were crystallized into the single phase Bi4Ti3O12 with c-axis orientation by successive heat-treatment at 800 °C. Micropatterns with linewidth of 1 μm were crystallized into single crystals and their volume was reduced to 15% by the heat-treatment. PZT and Bi4Ti3O12 thin films formed by the dipping pyrolysis method, which is the base of this patterning process, exhibited good ferroelectric properties; the remanent polarization Pr and the coercive field Ec were 24 μC/cm2 and 39 kV/cm for PZT, and 1.6 μC/cm2 and 24 kV/cm for Bi4Ti3O12, respectively.",

author = "Soichiro Okamura and Atsushi Kakimi and Yukie Yagi and Katsumi Mori and Takeyo Tsukamoto",

year = "1994",

language = "English",

pages = "62--65",

note = "Proceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics ; Conference date: 07-08-1994 Through 10-08-1994",

}

Micropatterning process of ferroelectric oxides by irradiation of an electron beam on metal naphthenate films. / Okamura, Soichiro; Kakimi, Atsushi; Yagi, Yukie et al.
1994. 62-65 Paper presented at Proceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics, University Park, PA, USA.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Micropatterning process of ferroelectric oxides by irradiation of an electron beam on metal naphthenate films

AU - Okamura, Soichiro

AU - Kakimi, Atsushi

AU - Yagi, Yukie

AU - Mori, Katsumi

AU - Tsukamoto, Takeyo

PY - 1994

Y1 - 1994

N2 - Fine micropatterns with linewidth of 0.35 μm were fabricated by irradiation of an electron beam on metal naphthenate films being precursors of ferroelectric oxide and development with a solvent. Relatively large patterns were crystallized into the single phase Bi4Ti3O12 with c-axis orientation by successive heat-treatment at 800 °C. Micropatterns with linewidth of 1 μm were crystallized into single crystals and their volume was reduced to 15% by the heat-treatment. PZT and Bi4Ti3O12 thin films formed by the dipping pyrolysis method, which is the base of this patterning process, exhibited good ferroelectric properties; the remanent polarization Pr and the coercive field Ec were 24 μC/cm2 and 39 kV/cm for PZT, and 1.6 μC/cm2 and 24 kV/cm for Bi4Ti3O12, respectively.

AB - Fine micropatterns with linewidth of 0.35 μm were fabricated by irradiation of an electron beam on metal naphthenate films being precursors of ferroelectric oxide and development with a solvent. Relatively large patterns were crystallized into the single phase Bi4Ti3O12 with c-axis orientation by successive heat-treatment at 800 °C. Micropatterns with linewidth of 1 μm were crystallized into single crystals and their volume was reduced to 15% by the heat-treatment. PZT and Bi4Ti3O12 thin films formed by the dipping pyrolysis method, which is the base of this patterning process, exhibited good ferroelectric properties; the remanent polarization Pr and the coercive field Ec were 24 μC/cm2 and 39 kV/cm for PZT, and 1.6 μC/cm2 and 24 kV/cm for Bi4Ti3O12, respectively.

UR - http://www.scopus.com/inward/record.url?scp=0028722720&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0028722720

SP - 62

EP - 65

T2 - Proceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics

Y2 - 7 August 1994 through 10 August 1994

ER -

Micropatterning process of ferroelectric oxides by irradiation of an electron beam on metal naphthenate films

Abstract

Conference

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