Hydrostatic ionic liquid-lubricated fluid film bearing for a rotational electron-beam lithography system

Research output: Contribution to journalArticle

Abstract

Rotational electron-beam mastering (REBM) systems have been studied with the aim of achieving the high data density necessary to facilitate the fabrication of next-generation optical data media, such as holographic storage. This study reports the design and testing of an ionic liquid (IL)-lubricated hydrostatic spindle system comprising an IL bearing, IL supply pump, and ionic magnetic fluid seal; and its outgassing performance under high-vacuum conditions. An inner vacuum chamber pressure of approximately 10−4 Pa was maintained during rotation of the spindle system. The outgassed products, as measured by a quadrupole mass spectrometer, were primarily generated from the air components in the lubricant IL. The non-repeatable runout in the radial direction, which is an important parameter of REBM accuracy, was 100 nm for a rotational speed of less than 130 min−1. The proposed method can be used for a 100-nm scale REBM device.

Original languageEnglish
Pages (from-to)194-203
Number of pages10
JournalPrecision Engineering
Volume61
DOIs
Publication statusPublished - Jan 2020

Fingerprint

Bearings (structural)
Electron beam lithography
Ionic liquids
Electron beams
Fluids
Vacuum
Magnetic fluids
Degassing
Mass spectrometers
Seals
Lubricants
Pumps
Fabrication
Testing
Air

Keywords

  • High vacuum
  • Hydrostatic bearing
  • Ionic liquid
  • Ionic magnetic fluid
  • Magnetic fluid seal
  • Outgassing

Cite this

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abstract = "Rotational electron-beam mastering (REBM) systems have been studied with the aim of achieving the high data density necessary to facilitate the fabrication of next-generation optical data media, such as holographic storage. This study reports the design and testing of an ionic liquid (IL)-lubricated hydrostatic spindle system comprising an IL bearing, IL supply pump, and ionic magnetic fluid seal; and its outgassing performance under high-vacuum conditions. An inner vacuum chamber pressure of approximately 10−4 Pa was maintained during rotation of the spindle system. The outgassed products, as measured by a quadrupole mass spectrometer, were primarily generated from the air components in the lubricant IL. The non-repeatable runout in the radial direction, which is an important parameter of REBM accuracy, was 100 nm for a rotational speed of less than 130 min−1. The proposed method can be used for a 100-nm scale REBM device.",
keywords = "High vacuum, Hydrostatic bearing, Ionic liquid, Ionic magnetic fluid, Magnetic fluid seal, Outgassing",
author = "Takao Okabe and Shinya Sasaki and Yukishige Kondo and Masaaki Miyatake and Shigeka Yoshimoto",
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AU - Okabe, Takao

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AU - Kondo, Yukishige

AU - Miyatake, Masaaki

AU - Yoshimoto, Shigeka

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N2 - Rotational electron-beam mastering (REBM) systems have been studied with the aim of achieving the high data density necessary to facilitate the fabrication of next-generation optical data media, such as holographic storage. This study reports the design and testing of an ionic liquid (IL)-lubricated hydrostatic spindle system comprising an IL bearing, IL supply pump, and ionic magnetic fluid seal; and its outgassing performance under high-vacuum conditions. An inner vacuum chamber pressure of approximately 10−4 Pa was maintained during rotation of the spindle system. The outgassed products, as measured by a quadrupole mass spectrometer, were primarily generated from the air components in the lubricant IL. The non-repeatable runout in the radial direction, which is an important parameter of REBM accuracy, was 100 nm for a rotational speed of less than 130 min−1. The proposed method can be used for a 100-nm scale REBM device.

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KW - Hydrostatic bearing

KW - Ionic liquid

KW - Ionic magnetic fluid

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