Abstract
Very long ErSi2 nanowires were formed on a Si(110) substrate by a self-assembly process. The wires were highly parallel and grew in the Si 〈011〉 direction. Nanowires with lengths more than 50 μm were fabricated. It was observed by transmission electron microscopy that the wires were hexagonal crystal type, having their c-axis (〈0001〉 direction) perpendicular to the Si(112) plane. Then the nanowires were deeply buried in the Si(110) surface. Energy-dispersive X-ray spectroscopy measurements indicated that the nanowires had a ErSi2 chemical composition. Electrical conductivity measurement of the nanowires formed on high-resistivity Si substrates showed that the ErSi2 nanowires were good conductors at room temperature. The ErSi2 nanowire might be a promising candidate in nanometer-sized inter connection.
| Original language | English |
|---|---|
| Pages (from-to) | 5535-5537 |
| Number of pages | 3 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 45 |
| Issue number | 6 B |
| DOIs | |
| Publication status | Published - 20 Jun 2006 |
Keywords
- Crystal structure
- ErSi
- Nanowire
- TEM