Formation and structure analysis of very long ErSi2 nanowires formed on Si(110) substrates

Ryouki Watanabe, Susumu Harako, Takashi Kuzuu, Kazuki Kouno, Tomohiro Kobayashi, Takashi Meguro, Xinwei Zhao

Research output: Contribution to journalReview articlepeer-review

6 Citations (Scopus)

Abstract

Very long ErSi2 nanowires were formed on a Si(110) substrate by a self-assembly process. The wires were highly parallel and grew in the Si 〈011〉 direction. Nanowires with lengths more than 50 μm were fabricated. It was observed by transmission electron microscopy that the wires were hexagonal crystal type, having their c-axis (〈0001〉 direction) perpendicular to the Si(112) plane. Then the nanowires were deeply buried in the Si(110) surface. Energy-dispersive X-ray spectroscopy measurements indicated that the nanowires had a ErSi2 chemical composition. Electrical conductivity measurement of the nanowires formed on high-resistivity Si substrates showed that the ErSi2 nanowires were good conductors at room temperature. The ErSi2 nanowire might be a promising candidate in nanometer-sized inter connection.

Original languageEnglish
Pages (from-to)5535-5537
Number of pages3
JournalJapanese Journal of Applied Physics
Volume45
Issue number6 B
DOIs
Publication statusPublished - 20 Jun 2006

Keywords

  • Crystal structure
  • ErSi
  • Nanowire
  • TEM

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