Abstract
Bi4Ti3O12 (BIT) thin films with TiO 2 anatase layer have been prepared on the Pt/Ti/SiO2/Si substrates by metalorganic chemical vapor deposition. The BIT thin films with TiO2 anatase layer exhibit highly a- and b-axes orientation, although the BIT thin film with no layer exhibits a c-axis orientation. The interdiffusion between BIT thin film and Pt substrate was prevented by inserting TiO2 anatase layer. The ferroelectricity depends on the thickness ratio of the BIT thin film to the TiO2 anatase layer, indicating that the TiO2 anatase layer acts not as barrier layer but as an initial nucleation layer. When the thickness ratio was fixed at [(BIT)/(TiO 2)] = 15, the remanent polarization (Pr) and the coercive field (Ec) were 2Pr = 81.6 μC/cm2 and 2Ec = 250 kV/cm, respectively. The dielectric constant (εr) is 160.
Original language | English |
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Pages (from-to) | 9-16 |
Number of pages | 8 |
Journal | Ferroelectrics |
Volume | 357 |
Issue number | 1 PART 3 |
DOIs | |
Publication status | Published - 2007 |
Event | 5th Asian Meeting on Ferroelectricity, AMF-5 - Noda, Japan Duration: 3 Sept 2006 → 7 Sept 2006 |
Keywords
- BiTiO (BIT) thin film
- Electronic structure
- Initial nucleation
- MOCVD
- TiO anatase layer