Fabrication of a hydrophobic three-dimensional hybrid structure using an UV-curable electron beam resist

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Abstract

Biomimetic techniques are being studied for use in many fields. The hydrophobic surface is among the biomimetic features used in many industrial products, such as liquid-crystal display monitors and windows. The surface has a fine hybrid three-dimensional (3D) structure, comprising micro- and nanoscale structures that can be seen on the surfaces of the lotus leaf and rose petal. Many methods of fabricating 3D hybrid structures have been developed. In this study, a new fabrication method, employing UV nanoimprint lithography (UV-NIL) and electron beam lithography (EBL), was developed to prepare a polymeric hydrophobic surface. When employing this method, EBL forms a nanoscale pattern directly on the microscale pattern generated by UV-NIL. A UV-curable electron-beam resist polymer was prepared with a positive-tone EBL pattern on a UV-NIL pattern. The fabrication of a hydrophobic structure was demonstrated.

Original languageEnglish
Article numberSDDJ02
JournalJapanese Journal of Applied Physics
Volume58
Issue numberSD
DOIs
Publication statusPublished - 2019

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