Development of Au/Pt/Ti multilayers for wafer-level packaging and residual gas gettering

S. Kariya, T. Matsumae, Y. Kurashima, H. Takagi, M. Hayase, E. Higurashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

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Keyphrases

Engineering

Material Science