Cross-sectional structures and conductive properties of ITO–Al2O3 composite thin films prepared by aerosol deposition

Kotaro Ogawa; Kazuki Shinozuka; Yumeng Zheng; Kenji Sakai; Shinzo Yoshikado; Yuuki Sato

doi:10.2109/jcersj2.25008

Cross-sectional structures and conductive properties of ITO–Al₂O₃ composite thin films prepared by aerosol deposition

Kotaro Ogawa
, Kazuki Shinozuka
, Yumeng Zheng
, Kenji Sakai
, Shinzo Yoshikado
, Yuuki Sato

Department of Applied Physics

Research output: Contribution to journal › Article › peer-review

Abstract

Tin-doped indium oxide (ITO) thin films are used extensively, particularly in flat-panel displays and photovoltaic cells, because of their exceptional electrical conductivity and high visible-light transmittance. However, ITO is expensive because one of its components is In, which is a rare metal, making a stable supply of ITO difficult to attain. The objective of the present study was to reduce the use of In in ITO by combining it with Al₂O₃, which is relatively inexpensive and highly transparent, and exhibits high mechanical strength. The resulting ITO–Al₂O₃ composite thin films were fabricated by aerosol deposition.

Original language	English
Pages (from-to)	302-307
Number of pages	6
Journal	Journal of the Ceramic Society of Japan
Volume	133
Issue number	7
DOIs	https://doi.org/10.2109/jcersj2.25008
Publication status	Published - 1 Jul 2025

Keywords

Aerosol deposition (AD)
AlO
Composite
Crystallite size
Room-temperature impact consolidation
Thin film
Tin-doped indium oxide (ITO)

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10.2109/jcersj2.25008

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abstract = "Tin-doped indium oxide (ITO) thin films are used extensively, particularly in flat-panel displays and photovoltaic cells, because of their exceptional electrical conductivity and high visible-light transmittance. However, ITO is expensive because one of its components is In, which is a rare metal, making a stable supply of ITO difficult to attain. The objective of the present study was to reduce the use of In in ITO by combining it with Al2O3, which is relatively inexpensive and highly transparent, and exhibits high mechanical strength. The resulting ITO–Al2O3 composite thin films were fabricated by aerosol deposition.",

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T1 - Cross-sectional structures and conductive properties of ITO–Al2O3 composite thin films prepared by aerosol deposition

AU - Ogawa, Kotaro

AU - Shinozuka, Kazuki

AU - Zheng, Yumeng

AU - Sakai, Kenji

AU - Yoshikado, Shinzo

AU - Sato, Yuuki

PY - 2025/7/1

Y1 - 2025/7/1

N2 - Tin-doped indium oxide (ITO) thin films are used extensively, particularly in flat-panel displays and photovoltaic cells, because of their exceptional electrical conductivity and high visible-light transmittance. However, ITO is expensive because one of its components is In, which is a rare metal, making a stable supply of ITO difficult to attain. The objective of the present study was to reduce the use of In in ITO by combining it with Al2O3, which is relatively inexpensive and highly transparent, and exhibits high mechanical strength. The resulting ITO–Al2O3 composite thin films were fabricated by aerosol deposition.

AB - Tin-doped indium oxide (ITO) thin films are used extensively, particularly in flat-panel displays and photovoltaic cells, because of their exceptional electrical conductivity and high visible-light transmittance. However, ITO is expensive because one of its components is In, which is a rare metal, making a stable supply of ITO difficult to attain. The objective of the present study was to reduce the use of In in ITO by combining it with Al2O3, which is relatively inexpensive and highly transparent, and exhibits high mechanical strength. The resulting ITO–Al2O3 composite thin films were fabricated by aerosol deposition.

KW - Aerosol deposition (AD)

KW - AlO

KW - Composite

KW - Crystallite size

KW - Room-temperature impact consolidation

KW - Thin film

KW - Tin-doped indium oxide (ITO)

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M3 - Article

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JF - Journal of the Ceramic Society of Japan

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ER -

Cross-sectional structures and conductive properties of ITO–Al₂O₃ composite thin films prepared by aerosol deposition

Abstract

Keywords

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