Accurate phase analysis of interferometric fringes by the spatiotemporal phase-shifting method

Shien Ri, Taiki Takimoto, Peng Xia, Qinghua Wang, Hiroshi Tsuda, Shinji Ogihara

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Phase-shifting interferometry (PSI) has been widely applied in the field of accurate optical methodology. However, the fluctuation of background and amplitude intensities due to the instability of laser source, and phase-shifting error or vibration are significant problems for the PSI. In this study, the spatiotemporal phase-shifting method (ST-PSM) (Ri S et al 2019 J. Opt. 21 095702), which is a highly accurate and robust phase analysis method using spatial and temporal intensities information simultaneously, is first applied to laser interferometry to achieve a stable measurement. Through several simulations, three effects of fluctuations in background and amplitude intensities, phase-shifting error were investigated. As a result, we clarified that the periodic phase error with fundamental or second harmonic frequencies occurs in the conventional PSM method, whereas no periodic error occurs in the ST-PSM. Besides, the ST-PSM is also robust to the noise either for uniform or distorted interference fringe images. In the Michelson laser interferometer experiment, the ST-PSM realizes a much more stable measurement of phase and phase gradient distributions than the PSM. We have revealed the excellent performance and the striking advantage that ST-PSM is entirely free of periodic errors in a similar manner to the simulations. Therefore, laser interferometry using the ST-PSM can be expected to apply to various applications, including the extremely accurate non-contact shape and deformation measurement, as well as thickness measurement of transparent materials in life and material sciences.

Original languageEnglish
Article number105703
JournalJournal of Optics (United Kingdom)
Volume22
Issue number10
DOIs
Publication statusPublished - Oct 2020

Keywords

  • Fringe analysis
  • Laser interferometry
  • Optical metrology
  • Phase measurement
  • Phase-shifting error

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