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Personal profile

Fingerprint Dive into the research topics where Takao Okabe is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 2 Similar Profiles
Electron beams Engineering & Materials Science
Nanoimprint lithography Engineering & Materials Science
Ionic liquids Engineering & Materials Science
Vacuum Engineering & Materials Science
lithography Physics & Astronomy
Fabrication Engineering & Materials Science
electron beams Physics & Astronomy
fabrication Physics & Astronomy

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Research Output 2015 2020

  • 20 Citations
  • 3 h-Index
  • 10 Article
  • 1 Conference contribution
  • 1 Paper

Hydrostatic ionic liquid-lubricated fluid film bearing for a rotational electron-beam lithography system

Okabe, T., Sasaki, S., Kondo, Y., Miyatake, M. & Yoshimoto, S., Jan 2020, In : Precision Engineering. 61, p. 194-203 10 p.

Research output: Contribution to journalArticle

Bearings (structural)
Electron beam lithography
Ionic liquids
Electron beams
Fluids
Open Access
hybrid structures
Nanoimprint lithography
Electron beam lithography
Electron beams
lithography
2 Citations (Scopus)

Outgassing performance of an ionic liquid-based magnetic fluid

Okabe, T., Kondo, Y., Yoshimoto, S. & Sasaki, S., 1 Jun 2019, In : Vacuum. 164, p. 34-40 7 p.

Research output: Contribution to journalArticle

Ionic Liquids
Magnetic fluids
outgassing
Degassing
Ionic liquids

Stencil mask using ultra-violet-curable positive-tone electron beam resist

Maebashi, H., Okabe, T. & Taniguchi, J., 1 Jun 2019, In : Microelectronic Engineering. 214, p. 21-27 7 p.

Research output: Contribution to journalArticle

Masks
Electron beams
masks
electron beams
Electron beam lithography
Nanoimprint lithography
Electron beams
Nanostructures
lithography
electron beams